R. Kurosaki, T. Shimura, H. Komada, T. Kojima, Y. Watanabe
{"title":"Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab","authors":"R. Kurosaki, T. Shimura, H. Komada, T. Kojima, Y. Watanabe","doi":"10.1109/ISSM.2000.993614","DOIUrl":null,"url":null,"abstract":"A 300 mm generation automatic transport system, transport system with the \"interbay and intrabay diverging and converging method\" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.","PeriodicalId":104122,"journal":{"name":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSM.2000.993614","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12
Abstract
A 300 mm generation automatic transport system, transport system with the "interbay and intrabay diverging and converging method" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.
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