Impact of the storage layer charging on Random Telegraph Noise behavior of sub-50nm charge-trap-based TANOS and floating-gate memory cells

K. Seidel, R. Hoffmann, A. Naumann, J. Paul, D. Lohr, M. Czernohorsky, V. Beyer
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Abstract

Random Telegraph Noise (RTN) characterization was performed on charge-trap-based TANOS memory cells. The analysis results of cycle stress dependence and cell size scaling are discussed based on single cell measurements. Comparing charge-trap and floating-gate memory technologies different behavior for RTN was obtained. On charge-trap cells a threshold voltage dependence and superimposed noise was observed and is discussed based on measurement results and different cell architectures.
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存储层充电对亚50nm电荷阱TANOS和浮栅存储单元随机电报噪声行为的影响
随机电报噪声(RTN)表征进行了基于电荷阱的TANOS记忆细胞。讨论了基于单胞测量的循环应力依赖性和胞尺寸尺度的分析结果。比较电荷阱和浮门存储技术,得到了RTN的不同特性。在电荷阱电池中观察到阈值电压依赖性和叠加噪声,并根据测量结果和不同的电池结构进行了讨论。
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