Effects of UBM Thickness and Current Flow Configuration on Electromigration Failure Mechanisms in Solder Interconnects

Y. Kim, Allison T. Osmanson, H. Madanipour, C. Kim, P. Thompson, Qiao Chen
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Abstract

This paper investigates the effects of the under bump metallization (UBM) on Electromigration (EM) reliability of SAC solder joints and presents evidence suggestive of hidden mechanisms controlling the EM failure. This conclusion is based on the observation that the EM resistance does not show a monotonic increase with UBM thickness, but rather decreases above a certain critical limit. Since a thicker UBM would provide a greater supply of Cu, our observation contradicts the conventional view on the role of UBM on prolonging EM failure. We initially ascribed it to the increased of EM-prone microstructures or weak- links at the SAC/UBM interface active in thicker UBM layers. This is considered to be due to a more even distribution of EM flux across the joint by reducing current crowding at the corners of the joint. However, switching the test configuration, reducing current crowding, yielded results that disagreed with our proposition. It is found that the impact of the current configuration, and thereby the level of current crowding, on EM resistance does not vary much with the UBM thickness. This defies initial prediction that there would be a smaller impact in samples with thicker UBMs when the current configuration is switched. These results suggest that the EM failure mechanism is affected by UBM in a more complicated manner. Considering hidden factors such as the change in thermal stress with UBM thickness that act against the growth of EM void is necessary in order to better understand the mechanism.
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UBM厚度和电流结构对焊料互连电迁移失效机制的影响
本文研究了凹凸下金属化(UBM)对SAC焊点电迁移(EM)可靠性的影响,并提供了控制EM失效的隐藏机制的证据。这一结论是基于观察到电磁电阻不随UBM厚度单调增加,而是在一定的临界极限以上下降。由于较厚的UBM可以提供更多的Cu供应,因此我们的观察结果与关于UBM延长EM失效作用的传统观点相矛盾。我们最初将其归因于在较厚的UBM层中活跃的SAC/UBM界面上易受em影响的微结构或弱链接的增加。这被认为是由于通过减少关节角落的电流拥挤,电磁通量在关节上的分布更均匀。然而,切换测试配置,减少电流拥挤,产生的结果与我们的主张不一致。研究发现,电流配置以及电流拥挤程度对电磁电阻的影响并不会随着UBM厚度的变化而变化。这违背了最初的预测,即当切换当前配置时,在具有较厚ubm的样本中会有较小的影响。这些结果表明,UBM对电磁破坏机制的影响更为复杂。为了更好地理解其机理,有必要考虑热应力随厚度变化等潜在因素对电磁空洞生长的影响。
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