{"title":"System-level model of electrothermal microsystem with temperature control circuit","authors":"T. Bechtold, E. Rudnyi, D. Hohlfeld","doi":"10.1109/ESIME.2011.5765756","DOIUrl":null,"url":null,"abstract":"In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.","PeriodicalId":115489,"journal":{"name":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2011.5765756","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.
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