SPC precaution system

Abstract

Every module setup lot of charts to monitor off-line process data. Most of charts are sensitive to inline process data. Although each of charts had set control limit and specification to warn the process while trending up or down, there are still have risk to cause product fail due to narrow process window. It's very difficult and impossible to take care of all charts on manufacturing to find which of them are not stable. The paper shows a new methodology to take care of all of chart on manufacturing. The engineers only have to group the charts having the same process property (ex, resist THK, CD, Overlay, ETH, Etch-Rate, etc...) on system. This system will automatic create report and send the warning messages to engineer through the e-mail. It is very helpful for the module to find out which are the worst or getting worse charts. Engineer can take action early before the chart going worst and all of abnormal event can be prevented in advance. This new methodology not only increased the stability of production line, but also saved lot of manpower to handle abnormal event