Comprehensive study of intrinsic unipolar SiOx-based ReRAM characteristics in AC frequency response and low voltage (< 2V) operation

Ying‐Chen Chen, Yao‐Feng Chang, B. Fowler, F. Zhou, Xiaohan Wu, C. Hsieh, H. Chang, Chih-Hung Pan, Min-Chen Chen, Kuan‐Chang Chang, T. Tsai, T. Chang, Jack C. Lee
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引用次数: 2

Abstract

Intrinsic unipolar SiOx-based Resistive-RAM (ReRAM) characteristics have been investigated. The cross-bar MIM structures have been examined under AC frequency response, by varying device area, temperature and current states. The results provide additional insights into the hopping/switching mechanisms. For the first time, by using SiOx/HfOx stacking engineering, we have developed a low-voltage operation (<; 2V) for SiOx-based ReRAM. The SiOx/HfOx stacking optimization not only maintains the RS behaviors even in air environment without any programming window degradation, but also further reduces the switching voltage below 2V.
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综合研究基于siox的本征单极ReRAM在交流频率响应和低电压(< 2V)工作中的特性
本征单极siox基电阻式ram (ReRAM)的特性进行了研究。通过改变器件面积、温度和电流状态,研究了交叉杆MIM结构在交流频率响应下的性能。该结果为跳/切换机制提供了额外的见解。我们首次利用SiOx/HfOx堆叠工程,开发了一种低压操作(<;2V)用于基于siox的ReRAM。SiOx/HfOx叠加优化不仅在空气环境中保持了RS行为,而且没有任何编程窗口退化,而且进一步将开关电压降低到2V以下。
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