An advanced version of the electrically programmable hybrid-WSI substrate

H. Stopper
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引用次数: 5

Abstract

The electrically programmable interconnection wafer for hybrid wafer scale integration (WSI) or multichip modules (MCMs) depends on three key constituents, which are the antifuse, the thin-film transmission line, and the architecture. Their impact on device performance is explored, and their parametric improvements from early to present and potential future devices are appraised.<>
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电可编程混合wsi基板的高级版本
用于混合晶圆规模集成(WSI)或多芯片模块(mcm)的可编程互连晶圆取决于三个关键组成部分,即防熔丝、薄膜传输线和架构。探讨了它们对设备性能的影响,并评估了它们从早期到现在的参数改进和潜在的未来设备
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