Facile Route for Low-temperature Eco-friendly Solution Processed ZnSnO Thin-film Transistors

T. Zhao, Chun Zhao, I. Mitrovic, E. G. Lim, Li Yang, Chenghu Qiu, Cezhou Zhao
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Abstract

In this work, solution processed zinc tin oxide semiconductor films were investigated. Different from the widely reported high-temperature and toxic organic solvent-based fabrication process, a low temperature and eco-friendly aqueous solvent-based route was studied. The optimization of electrical performances on field effect mobility and reliability was proved. Moreover, a resistor-loaded inverter was constructed.
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低温环保溶液加工ZnSnO薄膜晶体管的便捷路线
本文研究了溶液法制备氧化锌锡半导体薄膜。不同于广泛报道的高温、有毒的有机溶剂基制备工艺,本文研究了一种低温、环保的水溶剂基制备工艺。从场效应、迁移率和可靠性等方面对电性能进行了优化。此外,还构造了一个电阻负载逆变器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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