Koutaro Kikukawa, Natsuki Sugaya, Shigeru Ohno, Y. Tomita
{"title":"Quantitative Evaluation of Bonded Silicon Wafer by Scanning Acoustic Tomography","authors":"Koutaro Kikukawa, Natsuki Sugaya, Shigeru Ohno, Y. Tomita","doi":"10.31399/asm.cp.istfa2021p0454","DOIUrl":null,"url":null,"abstract":"\n In this paper, we report the results of a quantitative evaluation of the resolution and detectability on images obtained by SAT through silicon wafers with the thicknesses of 775 and 100 µm by transducers with the most appropriate focal length.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"49 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2021p0454","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, we report the results of a quantitative evaluation of the resolution and detectability on images obtained by SAT through silicon wafers with the thicknesses of 775 and 100 µm by transducers with the most appropriate focal length.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
