O. Tamarin, J. Lachaud, H. Hallil, C. Dejous, D. Rebière
{"title":"Application of Love Wave Sensing With Mesoporous Thin Film","authors":"O. Tamarin, J. Lachaud, H. Hallil, C. Dejous, D. Rebière","doi":"10.1109/SBMicro.2019.8919282","DOIUrl":null,"url":null,"abstract":"Acoustic wave sensors are given special attention since a few decades as they offer a good sensitivity for detection applications. Their ability to operate in liquid and gas media make them a very interesting device. Nevertheless, to further improve their sensitivity in term of “mass loading effect”, the increasing of the surface to volume ratio of the associated sensitive layer is a promising strategy which could overcome many of the challenges faced by the in situ detection of low mass biomolecules. This paper presents an overview of the latest works carried out on the association of Love wave transducers with SiO2 and TiO2 porous layers at the IMS Laboratory. The principal results are developed, and the current investigations and perspective are exposed.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMicro.2019.8919282","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Acoustic wave sensors are given special attention since a few decades as they offer a good sensitivity for detection applications. Their ability to operate in liquid and gas media make them a very interesting device. Nevertheless, to further improve their sensitivity in term of “mass loading effect”, the increasing of the surface to volume ratio of the associated sensitive layer is a promising strategy which could overcome many of the challenges faced by the in situ detection of low mass biomolecules. This paper presents an overview of the latest works carried out on the association of Love wave transducers with SiO2 and TiO2 porous layers at the IMS Laboratory. The principal results are developed, and the current investigations and perspective are exposed.