Microwave characteristics of high f/sub max/ low noise thin film silicon-on-sapphire MOSFETs

R.A. Johnson, C.E. Chang, P. de la Houssaye, G. Garcia, I. Lagnado, P. Asbeck
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引用次数: 9

Abstract

We report the microwave characteristics and modeling of thin-film silicon-on-sapphire n- and p-channel MOS transistors with high f/sub max/, and low F/sub min/. N-channel and p-channel MOSFETs were fabricated with optically defined low resistance T-gates and found to have f/sub max/ values above 60 GHz and 40 GHz, respectively. The minimum noise figure, F/sub min/ was below 1 dB at 2 GHz for both devices. Both the f/sub max/ and F/sub min/ values are the best reported to date for silicon MOSFETs. A small signal model, similar to that used for MESFETs, is used here to model the devices, extract the small signal parameters and correlate the device structure with the measured performance.
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高f/sub max/低噪声薄膜蓝宝石上硅mosfet的微波特性
我们报道了具有高f/sub max/和低f/sub min/的蓝宝石上硅和p沟道薄膜MOS晶体管的微波特性和建模。n沟道和p沟道mosfet采用光学定义的低电阻t栅极制造,f/sub max/值分别高于60 GHz和40 GHz。两种设备在2 GHz时的最小噪声系数F/sub min/均低于1 dB。f/sub max/和f/sub min/值都是迄今为止报道的硅mosfet的最佳值。这里使用一个类似于mesfet的小信号模型来对器件建模,提取小信号参数并将器件结构与测量性能相关联。
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Analytical threshold voltage model for short channel n/sup +/-p/sup +/ double-gate SOI MOSFETs Front and back gate interface-trap generation due to hot carrier stress in fully depleted SOI/MOSFETs SOI material characterization using optical second harmonic generation Minimum parasitic resistance for ultra-thin SOI MOSFET with high-permittivity gate insulator performed by lateral contact structure Transient effects in floating body SOI NMOSFETs
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