{"title":"Ultrasonic stresses in thermosonic ball bonding","authors":"M. Mayer","doi":"10.1109/ESIME.2011.5765863","DOIUrl":null,"url":null,"abstract":"The risk of chip damage due to ultrasonic stresses in ball bonding needs to be managed while assuring a high bond strength. Chips with low-k dielectrics are less robust than those with SiO2, and if novel Cu or Pd coated Cu bonding wire is used, larger stresses are common during bonding. A finite element model can predict stresses at all locations under the pad including those due to the dynamics of the bonding tool. An experimental verification of these tool dynamics has not been done and is suggested using integrated piezo-resistive stress microsensors on a custom made testchip. The suitability of such a stress sensor design is discussed.","PeriodicalId":115489,"journal":{"name":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2011.5765863","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
The risk of chip damage due to ultrasonic stresses in ball bonding needs to be managed while assuring a high bond strength. Chips with low-k dielectrics are less robust than those with SiO2, and if novel Cu or Pd coated Cu bonding wire is used, larger stresses are common during bonding. A finite element model can predict stresses at all locations under the pad including those due to the dynamics of the bonding tool. An experimental verification of these tool dynamics has not been done and is suggested using integrated piezo-resistive stress microsensors on a custom made testchip. The suitability of such a stress sensor design is discussed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
