Designing micromachined accelerometers with interferometric detection

Abstract

This paper explores designs for the implementation of high sensitivity accelerometers based on Fabry-Perot interferometers. Although such structures have the potential to achieve mug resolutions, design and implementation challenges can be limiting. This paper discusses the creation of such devices using two distinct proof mass and optical designs: one of a monolithic flexure with a thin film metallic reflector and another of an elastomeric flexure with a thin film multilayer dielectric reflector. Each device was fabricated, tested and characterized and conclusions about the advantages and disadvantages of the different design features are presented