Introduction of equipment level FDC system for semiconductor wet-cleaning equipment optimization and real-time fault detection

Abstract

The proposed paper presents an equipment level FDC system for the optimization and anomaly detection of semiconductor equipment. Through the equipment level FDC(Fault Detection and Classification) system, various data in the equipment can be converted into meaningful and accurate analysis data through context mapping to facilitate analysis of the management and condition of the equipment. In addition, it is possible to proactively identify and respond to problems at the equipment level before identifying and responding to problems on the host by processing data of diverse equipment in real time.