Junhui Zhang, Sai Zhang, Yuhua Yang, Wendong Zhang
{"title":"Progress of MEMS acoustic emission sensor: a review","authors":"Junhui Zhang, Sai Zhang, Yuhua Yang, Wendong Zhang","doi":"10.1108/sr-06-2023-0232","DOIUrl":null,"url":null,"abstract":"<h3>Purpose</h3>\n<p>Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments.</p><!--/ Abstract__block -->\n<h3>Design/methodology/approach</h3>\n<p>This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future.</p><!--/ Abstract__block -->\n<h3>Findings</h3>\n<p>Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential.</p><!--/ Abstract__block -->\n<h3>Originality/value</h3>\n<p>In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.</p><!--/ Abstract__block -->","PeriodicalId":49540,"journal":{"name":"Sensor Review","volume":"31 1","pages":""},"PeriodicalIF":1.6000,"publicationDate":"2024-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensor Review","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1108/sr-06-2023-0232","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
Purpose
Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments.
Design/methodology/approach
This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future.
Findings
Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential.
Originality/value
In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.
期刊介绍：
Sensor Review publishes peer reviewed state-of-the-art articles and specially commissioned technology reviews. Each issue of this multidisciplinary journal includes high quality original content covering all aspects of sensors and their applications, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of high technology sensor developments.
Emphasis is placed on detailed independent regular and review articles identifying the full range of sensors currently available for specific applications, as well as highlighting those areas of technology showing great potential for the future. The journal encourages authors to consider the practical and social implications of their articles.
All articles undergo a rigorous double-blind peer review process which involves an initial assessment of suitability of an article for the journal followed by sending it to, at least two reviewers in the field if deemed suitable.
Sensor Review’s coverage includes, but is not restricted to:
Mechanical sensors – position, displacement, proximity, velocity, acceleration, vibration, force, torque, pressure, and flow sensors
Electric and magnetic sensors – resistance, inductive, capacitive, piezoelectric, eddy-current, electromagnetic, photoelectric, and thermoelectric sensors
Temperature sensors, infrared sensors, humidity sensors
Optical, electro-optical and fibre-optic sensors and systems, photonic sensors
Biosensors, wearable and implantable sensors and systems, immunosensors
Gas and chemical sensors and systems, polymer sensors
Acoustic and ultrasonic sensors
Haptic sensors and devices
Smart and intelligent sensors and systems
Nanosensors, NEMS, MEMS, and BioMEMS
Quantum sensors
Sensor systems: sensor data fusion, signals, processing and interfacing, signal conditioning.
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