Sajjad Habashi Youvalari, Arash Olianezhad, S. Afrang
{"title":"Design and simulation of a MEMS-based piezoelectric micropump for bio-medical applications","authors":"Sajjad Habashi Youvalari, Arash Olianezhad, S. Afrang","doi":"10.1108/sr-01-2023-0004","DOIUrl":null,"url":null,"abstract":"\nPurpose\nThe purpose of this paper is to design and simulate a piezoelectric micropump using microelectromechanical systems technology for drug delivery applications.\n\n\nDesign/methodology/approach\nTwo piezoelectric actuators are used to actuate and bend the diaphragms in the proposed structure. In this micropump, the liquid flow is rectified by two silicon check valves.\n\n\nFindings\nThe use of two piezoelectric transducer (PZT) actuators in the parallel mod not only reduces dead volume but also increases stroke volume as well. In addition to increasing the flow rate, this phenomenon enhances the operation of the micropump to have self-priming as smoothly as possible.\n\n\nOriginality/value\nThis actuating method results in a 22% increase in flow rate and compression ratio, as well as a 15% reduction in function voltage. The fluid-solid interaction is simulated using COMSOL Multiphysics 5.3a.\n","PeriodicalId":49540,"journal":{"name":"Sensor Review","volume":" ","pages":""},"PeriodicalIF":1.6000,"publicationDate":"2023-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensor Review","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1108/sr-01-2023-0004","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
Purpose
The purpose of this paper is to design and simulate a piezoelectric micropump using microelectromechanical systems technology for drug delivery applications.
Design/methodology/approach
Two piezoelectric actuators are used to actuate and bend the diaphragms in the proposed structure. In this micropump, the liquid flow is rectified by two silicon check valves.
Findings
The use of two piezoelectric transducer (PZT) actuators in the parallel mod not only reduces dead volume but also increases stroke volume as well. In addition to increasing the flow rate, this phenomenon enhances the operation of the micropump to have self-priming as smoothly as possible.
Originality/value
This actuating method results in a 22% increase in flow rate and compression ratio, as well as a 15% reduction in function voltage. The fluid-solid interaction is simulated using COMSOL Multiphysics 5.3a.
期刊介绍:
Sensor Review publishes peer reviewed state-of-the-art articles and specially commissioned technology reviews. Each issue of this multidisciplinary journal includes high quality original content covering all aspects of sensors and their applications, and reflecting the most interesting and strategically important research and development activities from around the world. Because of this, readers can stay at the very forefront of high technology sensor developments.
Emphasis is placed on detailed independent regular and review articles identifying the full range of sensors currently available for specific applications, as well as highlighting those areas of technology showing great potential for the future. The journal encourages authors to consider the practical and social implications of their articles.
All articles undergo a rigorous double-blind peer review process which involves an initial assessment of suitability of an article for the journal followed by sending it to, at least two reviewers in the field if deemed suitable.
Sensor Review’s coverage includes, but is not restricted to:
Mechanical sensors – position, displacement, proximity, velocity, acceleration, vibration, force, torque, pressure, and flow sensors
Electric and magnetic sensors – resistance, inductive, capacitive, piezoelectric, eddy-current, electromagnetic, photoelectric, and thermoelectric sensors
Temperature sensors, infrared sensors, humidity sensors
Optical, electro-optical and fibre-optic sensors and systems, photonic sensors
Biosensors, wearable and implantable sensors and systems, immunosensors
Gas and chemical sensors and systems, polymer sensors
Acoustic and ultrasonic sensors
Haptic sensors and devices
Smart and intelligent sensors and systems
Nanosensors, NEMS, MEMS, and BioMEMS
Quantum sensors
Sensor systems: sensor data fusion, signals, processing and interfacing, signal conditioning.