{"title":"Monte Carlo impurity diffusion simulation considering charged species for low thermal budget sub-50 nm CMOS process modeling","authors":"M. Hane, T. Ikezawa, K. Takeuchi, G. Gilmer","doi":"10.1007/978-3-7091-6244-6_3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":13825,"journal":{"name":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","volume":"84 1","pages":"38.4.1-38.4.4"},"PeriodicalIF":0.0000,"publicationDate":"2001-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-7091-6244-6_3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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