Reliability of thermal compression bond combine with non conductive paste process in fine pitch micro-bumps soldering

Chien-Feng Chan, Wen-Tsung Tseng, Huei-Nuan Huang, Mu-Hsuan Chan, Chun-Tang Lin, Chi-Hsin Chiu
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Abstract

In order to meet the miniaturization trend and to reduce the power consumption for next generation devices, three-dimensional (3D) stacking is believed to be one of the technologies that can meet these requirements. In advanced 3D stacking technologies, one of the important steps is to develop and assembly fine pitch and high density microbumps. However, while the stacking chip size of top die and bottom die are similar, there is not enough space to dispense underfill, so it is a challenge for conventional underfill (CUF). In this paper, thermal compression bond (TCB) combine with non conductive paste (NCP) were studied. Adhesion between NCP and SiN, adhesion between NCP and PI, simulation of stress between bumps and chips were carried out and discussed. Finally, reliability test results were also reported in this paper.
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热压缩粘结剂结合非导电膏体工艺在细间距微凸点焊接中的可靠性
为了满足下一代器件的小型化趋势和降低功耗,三维(3D)堆叠技术被认为是满足这些要求的技术之一。在先进的三维堆积技术中,开发和组装细间距和高密度微凸点是一个重要步骤。然而,虽然上模和下模的堆积芯片尺寸相似,但由于没有足够的空间来分配下填充,因此对传统的下填充(CUF)提出了挑战。本文研究了热压粘结剂(TCB)与非导电浆料(NCP)的结合。对NCP与SiN、NCP与PI之间的粘附、凸点与切屑之间的应力模拟进行了讨论。最后,给出了信度测试结果。
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