Jong Kyung Park, Dong-il Moon, Yang‐Kyu Choi, Seok-Hee Lee, Ki-hong Lee, S. Pyi, B. Cho
{"title":"Origin of transient Vth shift after erase and its impact on 2D/3D structure charge trap flash memory cell operations","authors":"Jong Kyung Park, Dong-il Moon, Yang‐Kyu Choi, Seok-Hee Lee, Ki-hong Lee, S. Pyi, B. Cho","doi":"10.1109/IEDM.2012.6478964","DOIUrl":null,"url":null,"abstract":"The mechanism of transient Vth shift after erase is studied in detail. It is concluded that the main mechanism is hole redistribution in the charge trap layer. A new erase scheme is proposed and demonstrated to reduce transient Vth shift. The impact of transient Vth shift on the 3D charge trap device is investigated, as well.","PeriodicalId":6376,"journal":{"name":"2012 International Electron Devices Meeting","volume":"54 1","pages":"2.4.1-2.4.4"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2012.6478964","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11
Abstract
The mechanism of transient Vth shift after erase is studied in detail. It is concluded that the main mechanism is hole redistribution in the charge trap layer. A new erase scheme is proposed and demonstrated to reduce transient Vth shift. The impact of transient Vth shift on the 3D charge trap device is investigated, as well.