Li Huang, B. Dong, Xin Guo, Yuhua Chang, N. Chen, Xingzhen Huang, Hong Wang, Chengkuo Lee, K. Ang
{"title":"Integration of 2D Black Phosphorus Phototransistor and Silicon Photonics Waveguide System Towards Mid-Infrared On-Chip Sensing Applications","authors":"Li Huang, B. Dong, Xin Guo, Yuhua Chang, N. Chen, Xingzhen Huang, Hong Wang, Chengkuo Lee, K. Ang","doi":"10.1109/VLSIT.2018.8510658","DOIUrl":null,"url":null,"abstract":"We demonstrate the first black phosphorus phototransistor integrated with Si photonics waveguide system towards mid-infrared (MIR) sensing. At a wavelength of 3.78 µm, the black phosphorus phototransistor achieves a high responsivity of 0.7 A/W under a small drain bias of −1 V at room-temperature. Additionally, the device offers gate and drain bias tunability to suppress dark current while simultaneously optimize photo-response performance. Our results reveal the potential of black phosphorus for MIR detection to enable the realization of integrated on-chip systems for MIR sensing applications.","PeriodicalId":6561,"journal":{"name":"2018 IEEE Symposium on VLSI Technology","volume":"44 1","pages":"161-162"},"PeriodicalIF":0.0000,"publicationDate":"2018-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE Symposium on VLSI Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/VLSIT.2018.8510658","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We demonstrate the first black phosphorus phototransistor integrated with Si photonics waveguide system towards mid-infrared (MIR) sensing. At a wavelength of 3.78 µm, the black phosphorus phototransistor achieves a high responsivity of 0.7 A/W under a small drain bias of −1 V at room-temperature. Additionally, the device offers gate and drain bias tunability to suppress dark current while simultaneously optimize photo-response performance. Our results reveal the potential of black phosphorus for MIR detection to enable the realization of integrated on-chip systems for MIR sensing applications.
我们展示了第一个集成了硅光子波导系统的黑磷光电晶体管,用于中红外(MIR)传感。在3.78µm波长下,在- 1 V的漏极偏置下,黑磷光电晶体管的响应率高达0.7 a /W。此外,该器件提供栅极和漏极偏置可调性,以抑制暗电流,同时优化光响应性能。我们的研究结果揭示了黑磷在MIR检测中的潜力,使MIR传感应用的集成片上系统得以实现。