Large-scale 2D electronics based on single-layer MoS2 grown by chemical vapor deposition

H. Wang, L. Yu, Y. Lee, W. Fang, A. Hsu, P. Herring, M. Chin, M. Dubey, L. Li, J. Kong, T. Palacios
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引用次数: 71

Abstract

2D nanoelectronics based on single-layer MoS2 offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS2 and fabrication of integrated devices and circuits for the first time. Fundamental building blocks of digital electronics, such as inverters and NAND gates, are fabricated to demonstrate its capability for logic applications.
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基于化学气相沉积法生长的单层二硫化钼的大规模二维电子学
基于单层二硫化钼的二维纳米电子学为传统和普遍应用提供了巨大的优势。本文首次讨论了单层二硫化钼的大规模CVD生长和集成器件和电路的制备。数字电子的基本构建模块,如逆变器和NAND门,被制造来展示其逻辑应用的能力。
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