Yanhua Fan, Shuhui Yu, R. Sun, Lei Li, Mian Huang, Yan-sheng Yin, L. Wan
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引用次数: 3
Abstract
Ba0.7Sr0.3TiO3 thin films have been deposited on copper foils via sol-gel method. The films have been processed in almost inert atmosphere so that the substrate oxidation is avoided while allowing the perovskite phase to crystallize. Polyethylene glycol (PEG) with the molecular weight of 200 was employed to modify the BST precursor solutions. The effect of PEG on the microstructure and dielectric properties of BST thin films has been investigated. Leakage current for BST thin film made from the sol with PEG modification is reported.
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