A. Mocuta, P. Weckx, S. Demuynck, D. Radisic, Y. Oniki, J. Ryckaert
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引用次数: 17
Abstract
We look at several scaling boosters necessary to accomplish CMOS area scaling towards the 2nm node. We consider aspects of standard cell area scaling, transistor architecture, SRAM, and BEOL. We also demonstrate integrated flows and hardware feasibility for such scaling boosters.