Vacuum underfill technology for advanced packaging (IMPACT 2011)

M. Hoshiyama, M. Hasegawa, T. Sato, H. Yoshii, O. Suzuki, K. Kotaka, T. Nagasaka, A. Horibe, Marie-Claude Paquet, M. Gaynes, C. Feger, K. Sakuma, J. Knickerbocker, Y. Orii, K. Terada, K. Ishikawa, Y. Hirayama
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Abstract

We developed vacuum underfill (VCUF) technology for large die (>18 × 18 mm) with fine pitch area array bumps (< 150 μm pitch) to solve a critical underfill void issue. Material development and process optimization are the keys to realize a stable process for future package. It was also confirmed that the newly developed underfill materials have good reliability on the large die package with vacuum assisted underfill process.
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先进包装的真空下填充技术(IMPACT 2011)
我们开发了真空下填充(VCUF)技术,用于具有细间距区域阵列凸起(< 150 μm间距)的大型模具(>18 × 18 mm),以解决关键的下填充空隙问题。材料开发和工艺优化是实现未来封装稳定工艺的关键。同时也证实了新开发的底填材料在真空辅助底填工艺的大型模具封装上具有良好的可靠性。
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