{"title":"A multi-physics simulation technique for integrated MEMS","authors":"H. Toshiyoshi, T. Konishi, K. Machida, K. Masu","doi":"10.1109/IEDM.2012.6478989","DOIUrl":null,"url":null,"abstract":"We have developed a multi-physics simulation platform for microelectromechanical systems (MEMS) on a spice-based circuit simulator (LTspice) and by interpreting the analytical models for electromechanical components such as electrostatic parallel-plate actuator, viscoelastic spring, and mechanical anchor by using behavioral current/voltage sources. The Kernel solver for the mechanical equation of motion (EOM) has been programmed by simply using the integral function of the LTspice mathematic library. Simulation capability has been extended to and tested against the electrostatic digital torsion mirror device integrated with CMOS level shifter circuit.","PeriodicalId":6376,"journal":{"name":"2012 International Electron Devices Meeting","volume":"10 1","pages":"6.3.1-6.3.4"},"PeriodicalIF":0.0000,"publicationDate":"2012-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2012.6478989","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
We have developed a multi-physics simulation platform for microelectromechanical systems (MEMS) on a spice-based circuit simulator (LTspice) and by interpreting the analytical models for electromechanical components such as electrostatic parallel-plate actuator, viscoelastic spring, and mechanical anchor by using behavioral current/voltage sources. The Kernel solver for the mechanical equation of motion (EOM) has been programmed by simply using the integral function of the LTspice mathematic library. Simulation capability has been extended to and tested against the electrostatic digital torsion mirror device integrated with CMOS level shifter circuit.
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