Engineering grains of Ge2Sb2Te5 for realizing fast-speed, low-power, and low-drift phase-change memories with further multilevel capabilities

W. J. Wang, D. Loke, L. Law, L. P. Shi, R. Zhao, M. Li, L. L. Chen, H. Yang, Y. Yeo, A. Adeyeye, T. Chong, A. Lacaita
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引用次数: 14

Abstract

Phase-change memory (PCM) represents one of the best candidates for a “universal memory”. However, its slow SET speed, high RESET power, and high resistance drift present key challenges towards this ambition. Here, grain-engineered Ge2Sb2Te5 is exploited to control the crystallization kinetics, and electrical properties of PCM. We report 120 % higher SET speeds with respect to conventional scaling. Good stability (140°C), 30 % RESET power reduction, and 2X lower resistance drift were also achieved. A 4-state/2-bit multilevel cell was further demonstrated. This provides a route to making high-density PCM devices.
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Ge2Sb2Te5的工程颗粒,用于实现具有进一步多电平功能的快速,低功耗和低漂移相变存储器
相变存储器(PCM)是“通用存储器”的最佳候选之一。然而,它的低SET速度、高RESET功率和高电阻漂移是实现这一目标的关键挑战。本文利用晶粒化的Ge2Sb2Te5来控制PCM的结晶动力学和电学性能。我们报告说,与传统缩放相比,SET速度提高了120%。良好的稳定性(140°C),复位功率降低30%,电阻漂移降低2倍。进一步演示了一个4状态/2位的多电平单元。这为制造高密度PCM器件提供了一条途径。
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