{"title":"光刻聚酰亚胺基板上激光诱导石墨烯薄膜的热性能","authors":"Fei Yang, Chengqun Yu, Johan Liu, Yong Zhang","doi":"10.23919/empc53418.2021.9584950","DOIUrl":null,"url":null,"abstract":"In this work, laser-induced graphene (LIG)/ polyimide (PI) films with good thermal properties were prepared by directly inducing graphene on the bare PI substrates by a computer numerical control (CNC) laser engraving machine. The obtained samples were characterized by scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The results showed that the laser energy density has a significant impact on the microstructures of the samples. Moreover, the thermal diffusivity of LIG/PI was increased from 0.5 mm2/s to 1.6 mm2/s, which is 3 times higher than bare PI. Finally, the electrothermal properties of the LIG films were investigated and the results showed that under a 12 V power supply, the equilibrium temperature of LIG films increases from 45°C to 74°C with the increase of laser energy density from 1.8 J/mm2 to 2.4 J/mm2. Our results indicate that this time-saving, low-cost, and environment-friendly method is promising for fabricating excellent graphene-based materials.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thermal Properties of Laser-induced Graphene Films Photothermally Scribed on Bare Polyimide Substrates\",\"authors\":\"Fei Yang, Chengqun Yu, Johan Liu, Yong Zhang\",\"doi\":\"10.23919/empc53418.2021.9584950\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, laser-induced graphene (LIG)/ polyimide (PI) films with good thermal properties were prepared by directly inducing graphene on the bare PI substrates by a computer numerical control (CNC) laser engraving machine. The obtained samples were characterized by scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The results showed that the laser energy density has a significant impact on the microstructures of the samples. Moreover, the thermal diffusivity of LIG/PI was increased from 0.5 mm2/s to 1.6 mm2/s, which is 3 times higher than bare PI. Finally, the electrothermal properties of the LIG films were investigated and the results showed that under a 12 V power supply, the equilibrium temperature of LIG films increases from 45°C to 74°C with the increase of laser energy density from 1.8 J/mm2 to 2.4 J/mm2. Our results indicate that this time-saving, low-cost, and environment-friendly method is promising for fabricating excellent graphene-based materials.\",\"PeriodicalId\":348887,\"journal\":{\"name\":\"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/empc53418.2021.9584950\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/empc53418.2021.9584950","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thermal Properties of Laser-induced Graphene Films Photothermally Scribed on Bare Polyimide Substrates
In this work, laser-induced graphene (LIG)/ polyimide (PI) films with good thermal properties were prepared by directly inducing graphene on the bare PI substrates by a computer numerical control (CNC) laser engraving machine. The obtained samples were characterized by scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The results showed that the laser energy density has a significant impact on the microstructures of the samples. Moreover, the thermal diffusivity of LIG/PI was increased from 0.5 mm2/s to 1.6 mm2/s, which is 3 times higher than bare PI. Finally, the electrothermal properties of the LIG films were investigated and the results showed that under a 12 V power supply, the equilibrium temperature of LIG films increases from 45°C to 74°C with the increase of laser energy density from 1.8 J/mm2 to 2.4 J/mm2. Our results indicate that this time-saving, low-cost, and environment-friendly method is promising for fabricating excellent graphene-based materials.