从毫秒到纳秒退火:挑战和新方法

2016 16th International Workshop on Junction Technology (IWJT) Pub Date : 2016-05-09 DOI:10.1109/IWJT.2016.7486662

Y. Wang, Shaoyin Chen, M. Shen, Xiaoru Wang

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引用次数: 0

摘要

纳秒(nsec)熔融退火提供了独特的能力，如超低热预算，高掺杂激活和超级断裂结。但由于热扩散长度比毫秒退火短两个数量级，因此工艺集成比毫秒退火困难。在本文中，我们将讨论一些关键挑战，并提出一种结合msec和nsec退火优点的新方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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From millisecond to nanosecond annealing: Challenges and new approach

Nanosecond (nsec) melt annealing offers unique capabilities such as ultra low thermal budget, high dopant activation and super abruption junctions. But process integration is more difficult than millisecond (msec) annealing due to two orders of magnitude smaller heat diffusion length. In this paper, we will discuss some of the key challenges, and propose a new approach that combines the benefits of both msec and nsec annealing.

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2016 16th International Workshop on Junction Technology (IWJT)

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