采用扫描声层析成像技术获取表面粗糙的高级LSI封装无死像和精细检测图像

Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2014-09-18 DOI:10.1109/IPFA.2014.6898147

K. Kitami, Masakatsu Murai, Natsuki Sugaya, O. Kikuchi, Shigeru Ohno

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引用次数: 7

摘要

我们已经开发了三个新的门跟踪功能，以获取无死像素和精细的检测图像，先进的LSI封装粗糙表面使用扫描声断层成像。这些方法包括预测曲面栅极跟踪、双曲面栅极跟踪和预测s2栅极跟踪。通过使用各种测试样本证明了这些函数的优点。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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New technique for acquiring dead pixel free and fine inspection image of advanced LSI package with rough surface using scanning acoustic tomograph

We have developed three new gate tracking functions to acquire dead-pixel-free and fine inspection images for advanced LSI packages with rough surface using a scanning acoustic tomo-graph. These are predicted surface gate tracking, double surface gate tracking and predicted S2-gate tracking methods. The advantages of these functions are demonstrated by using various test samples.

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Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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