选择性接触GaAs N-I-P-I结构的折射率调制

T. Hsu, W. Y. Wu, U. Efron, J. Schulman, G. Hasnain
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引用次数: 1

摘要

采用带选择触点的砷化镓(GaAs) nii进行折射调制表征;该Nipi器件具有n掺杂和p掺杂交替的薄层,总厚度为0.68 μm,掺杂浓度为n × p × 4×1018 cm-3。采用MBE技术原位培养了具有n-i-p-i结构的选择性触点。两个接触电极之间的距离为0.7 mm,每个电极的测量长度为1 mm。因此,该器件的有效面积约为0.7 mm × 1mm。该n-i-p-i器件的I-V测量显示出良好的二极管特性。利用Mach-Zehnder干涉仪测定了不同电流水平下的折射率变化。使用波长范围为8000 ~ 9000 Å的Ar+激光抽运环形染料激光器作为光源。折射率的变化是由信号光束(通过n-i-p-i器件)和参考光束产生的干涉图样的条纹位移决定的。利用一列几赫兹的电流脉冲来驱动n-i-p-i调制器,并消除了干涉系统中由于环境噪声引起的慢条纹漂移。在λ = 9000 Å注入电流水平为I < 50 mA时,记录到Δn > 1.5的正折射率变化,如图1所示。上述折射率调制结果比理论计算的预测结果大了两个数量级以上折射率变化的波长范围为8900 Å ~ 9050 Å。测量波长范围受限于λ < 8900 Å处的强带间吸收,以及我们的环形染料激光器所使用的sty-9染料的截止激光波长在λ > 9050 Å以上。
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Refractive Index Modulation in Selectively Contacted GaAs N-I-P-I Structures
A GaAs Nipi with selective contacts was used for refractive modulation characterization; this Nipi device has the alternative n- and p-doped thin layers at a total thickness of ≅ 0.68 μm and a doping concentration of n ≅ p ≅ 4×1018 cm-3. The selective contactings were grown in situ with the n-i-p-i structure by MBE technology. The distance between two contact electrodes is ≅ 0.7 mm and each electrode is measured at ≅ 1 mm in length. The active area of this device is, therefore, approximately 0.7 mm × 1 mm. The I-V measurement of this n-i-p-i device shows good diode characteristics. The refractive changes at various current levels were determined by using a Mach-Zehnder interferometer. An Ar+-laser pumped ring dye laser, which has a useful wavelength range from 8000 to 9000 Å, was used as a light source. The refractive index change was determined by the fringe shift of the interference pattern generated by the signal beam (which passes through the n-i-p-i device) and the reference beam. A train of current pulses at a few hertz was used to drive the n-i-p-i modulator and also eliminate the slow fringe drift due to environmental noises of the interferometric system. A positive refractive index change of Δn > 1.5 was recorded at an injection current level I < 50 mA at λ = 9000 Å, as shown in Figure 1. The above result of refractive index modulation is more than two orders of magnitude larger than the prediction from our theoretical calculation.1 This refractive index change is observed in the wavelength range from 8900 Å to 9050 Å. The measurement wavelength range was limited by the strong interband absorption at λ < 8900 Å, and by the cutoff lasing wavelength of the sty-9 dye used in our ring dye laser beyond λ > 9050 Å.
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