纳米技术中缺陷尺寸放大测试电阻开口的可能性

J. L. Garcia-Gervacio, J. Martínez-Castillo, V. Champac
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引用次数: 2

摘要

在纳米技术中,由于通孔数量和金属水平的增加,由电阻开孔引起的小延迟缺陷非常常见。这类缺陷的检测是现代电路中的一个主要问题。这些缺陷很难检测,并且是测试逃逸的重要来源,因此它们代表了可靠性风险。此外,这些缺陷的检测在工艺变化的情况下会恶化,并随着技术的缩小而变得更糟。本文提出了一种基于测试的设计(DFT)方法来放大电阻式开放缺陷的缺陷尺寸。DFT方法允许增加缺陷检测的概率,从而增加电路故障覆盖率。采用统计时序分析框架(STAF)来获取有缺陷和无缺陷电路的时序信息。考虑了工艺变化、空间相关性和随机掺杂波动。利用staff给出的时序信息,得到电路的统计故障覆盖率。在ISCAS-85基准电路上的仿真结果表明了所提出的DFT方法的良好效果。
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Possibilities of defect-size magnification for testing resistive-opens in nanometer technologies
Small delay defects caused by resistive opens are very common in nanometer technologies due to the rising number of vias and metal levels. The detection of this kind of defects is a major concern in modern circuits. These defects are hard to detect and are an important source of test escapes, and hence they represent a reliability risk. Furthermore, the detection of these defects aggravates in the presence of process variations and gets worse as the technology scales-down. In this paper, a Design-for-Test (DFT) methodology to magnify the defect-size of resistive-open defects is presented. The DFT methodology allows to increase the probability of detection of the defect, and hence the circuit fault coverage. A statistical timing analysis framework (STAF) is used to obtain the timing information of the circuit with and without defect. Process variations, spatial correlation and random dopant fluctuations are considered. Using the timing information given by the STAF, the statistical fault coverage of the circuit is obtained. Simulation results on ISCAS-85 benchmark circuits show promising results of the proposed DFT methodology.
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