交联聚乙烯酚作为柔性底栅底触点晶体管的介质

Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca
{"title":"交联聚乙烯酚作为柔性底栅底触点晶体管的介质","authors":"Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca","doi":"10.1109/SBMicro.2019.8919401","DOIUrl":null,"url":null,"abstract":"Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Cross-linked polyvinyl phenol as dielectric for flexible bottom gate bottom contact transistors\",\"authors\":\"Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca\",\"doi\":\"10.1109/SBMicro.2019.8919401\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.\",\"PeriodicalId\":403446,\"journal\":{\"name\":\"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SBMicro.2019.8919401\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMicro.2019.8919401","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

聚乙烯醇与交联剂被证明是一个介电膜,并结合到一个底栅有机晶体管结构。薄膜对可见光透明,耐有机溶剂,并与等离子体蚀刻相容以打开过孔。然而,只有交联薄膜经受住了光刻,以便在电介质的顶部形成底部接触电极的图案。交联膜的介电常数约为5,高于聚甲基丙烯酸甲酯和氧化硅。该器件具有应用于有机晶体管柔性传感器阵列的潜力。
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Cross-linked polyvinyl phenol as dielectric for flexible bottom gate bottom contact transistors
Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.
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