双极晶体管对SOI mosfet热载流子退化的影响

Y.S. Chang, S. Cristoloveanu, G. Reichert, P. Gentil, S.S. Li, J. Fossum
{"title":"双极晶体管对SOI mosfet热载流子退化的影响","authors":"Y.S. Chang, S. Cristoloveanu, G. Reichert, P. Gentil, S.S. Li, J. Fossum","doi":"10.1109/SOI.1995.526473","DOIUrl":null,"url":null,"abstract":"Hot-carrier-induced degradation is a major challenge for shrinking further the size of bulk Si or SOI components. Although there is no evidence that the aging of SOI MOSFETs is more severe than that of bulk Si counterparts, the degradation mechanisms are more complex: (i) not only the front gate but also the buried oxide and related interface may be damaged, (ii) interface coupling allows the front channel to sense the presence of defects at the opposite interface, (iii) the fields are different, and (iv) floating-body effects may come into play. The purpose of this work is to investigate the latter aspect by revealing the main consequences of stresses conducted in floating- and biased-body modes.","PeriodicalId":149490,"journal":{"name":"1995 IEEE International SOI Conference Proceedings","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1995-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Role of the bipolar transistor on the hot-carrier-degradation of SOI MOSFETs\",\"authors\":\"Y.S. Chang, S. Cristoloveanu, G. Reichert, P. Gentil, S.S. Li, J. Fossum\",\"doi\":\"10.1109/SOI.1995.526473\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Hot-carrier-induced degradation is a major challenge for shrinking further the size of bulk Si or SOI components. Although there is no evidence that the aging of SOI MOSFETs is more severe than that of bulk Si counterparts, the degradation mechanisms are more complex: (i) not only the front gate but also the buried oxide and related interface may be damaged, (ii) interface coupling allows the front channel to sense the presence of defects at the opposite interface, (iii) the fields are different, and (iv) floating-body effects may come into play. The purpose of this work is to investigate the latter aspect by revealing the main consequences of stresses conducted in floating- and biased-body modes.\",\"PeriodicalId\":149490,\"journal\":{\"name\":\"1995 IEEE International SOI Conference Proceedings\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-10-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1995 IEEE International SOI Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.1995.526473\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1995 IEEE International SOI Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.1995.526473","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

摘要

热载流子诱导的降解是进一步缩小体积硅或SOI组件尺寸的主要挑战。虽然没有证据表明SOI mosfet的老化比体硅mosfet更严重,但降解机制更为复杂:(i)不仅前门,而且埋藏的氧化物和相关界面也可能被破坏,(ii)界面耦合允许前通道感知到相反界面上缺陷的存在,(iii)场不同,(iv)浮体效应可能会起作用。这项工作的目的是通过揭示在浮体和偏体模式下进行的应力的主要后果来研究后一个方面。
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Role of the bipolar transistor on the hot-carrier-degradation of SOI MOSFETs
Hot-carrier-induced degradation is a major challenge for shrinking further the size of bulk Si or SOI components. Although there is no evidence that the aging of SOI MOSFETs is more severe than that of bulk Si counterparts, the degradation mechanisms are more complex: (i) not only the front gate but also the buried oxide and related interface may be damaged, (ii) interface coupling allows the front channel to sense the presence of defects at the opposite interface, (iii) the fields are different, and (iv) floating-body effects may come into play. The purpose of this work is to investigate the latter aspect by revealing the main consequences of stresses conducted in floating- and biased-body modes.
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Analytical threshold voltage model for short channel n/sup +/-p/sup +/ double-gate SOI MOSFETs Front and back gate interface-trap generation due to hot carrier stress in fully depleted SOI/MOSFETs SOI material characterization using optical second harmonic generation Minimum parasitic resistance for ultra-thin SOI MOSFET with high-permittivity gate insulator performed by lateral contact structure Transient effects in floating body SOI NMOSFETs
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