用于生物传感器的剪切模式AlN薄膜电声谐振器

IEEE Sensors, 2005. Pub Date : 2005-10-31 DOI:10.1109/ICSENS.2005.1597743

G. Wingqvist, J. Bjurstrom, L. Liljeholm, I. Katardjiev, A. Spetz

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引用次数: 39

摘要

提出了一种薄膜厚度激发剪切声波谐振器。利用新开发的反应溅射工艺，成功地生长出c轴相对于表面法线倾斜、平均倾斜约30度的氮化铝薄膜。利用上述工艺，制备了由剪切模式薄膜体声谐振器(FBAR)和微流控传输系统组成的生物传感器。研究了生物传感器在水、甘油和白蛋白中的工作特性。谐振器的谐振频率约为1.2 GHz，在水中的Q值约为150。并给出了稳定性和分辨率的结果。结果清楚地表明FBAR生物传感器在制造高灵敏度低成本生物传感器、生物分析工具以及一般液体传感方面的潜力

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Shear mode AlN thin film electroacoustic resonator for biosensor applications

A thin film thickness excited shear acoustic wave resonator is presented. Utilizing a newly developed reactive sputtering process AlN thin films with inclined c-axis relative to the surface normal with a mean tilt of around 30deg are successfully grown. Using the above process, a biosensor consisting of a shear mode thin film bulk acoustic resonator (FBAR) and a microfluidic transport system was fabricated. The biosensor operation in water, glycerol and albumin was characterized. The resonator had a resonance frequency of around 1.2 GHz and a Q value in water of around 150. Results concerning the stability and resolution are also presented. The results demonstrate clearly the potential of FBAR biosensors for the fabrication of highly sensitive low cost biosensors, bioanalytical tools as well as for liquid sensing in general

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IEEE Sensors, 2005.

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