R. Syms, M.M. Ahmad, I. Young, D. Gilderdale, D. Collins, M. Leach
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Batch fabrication of micro-coils for MR spectroscopy on silicon
A process for batch fabrication of low-cost microcoils for magnetic resonance (MR) spectroscopy of clinical biopsy samples is demonstrated. Conductors are fabricated on oxidized, intrinsic silicon substrates by electroplating metals inside a deep photoresist mould. Through-wafer deep reactive ion etching (DRIE) is used to define precise sample volumes and stencil cuts around each die, and dies are separated by snap-out. Single- and multiple-coil (Helmholtz-type) sensors are formed, by stacking parts on silicon baseplates. MR imaging and spectroscopy are both demonstrated on model samples, with high SNR
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