{"title":"研发周期时间系统中新技术转移的关键因素","authors":"C. Yu-Chih, K. L. Young, J.Y. Chou","doi":"10.1109/SMTW.2004.1393760","DOIUrl":null,"url":null,"abstract":"The new technology, process control and cycle time management in semiconductor manufacturing for the R&D (research and development department) is import and is a great challenge task, because of the numerous engineering holds, lot splits, and necessary experimental processes are executing continued. The other challenge is an R&D pilot line exist large variety of process technologies. Therefore, short cycle time for new technology or process to meet customer demand is difficult but must to achieve the mission of the goal. Forecast this goal, we had kicked off a cooperation plan which name is `R&D cycle time system' with R&D members cooperate to complete it. In this paper, we present the system that includes six effective factors that they can easy to find symptoms on a long cycle time, a process or a technology issue by layer, stage or step. We give they name of these six key handling factors as x-ratio RD,x-ratio FAB,x-ratio RD, x-ratio FAB,f-factor and R1-factor . These measurements can judge whether delivered a lot on time on a layer, a stage or step and the process and technology is stable or unstable on it. Specially, the measurement value of f-factor and f1-factor can suggest a process step of technology is maturity or not. They like the eyes on this complex and changeful process flow of the R&D, this system hope to be a useful tool for supporting R&D member to find out the process, technology and cycle time issues about this kind of a tough question","PeriodicalId":369092,"journal":{"name":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Key factor for new technology transfer on the R&D cycle-time system\",\"authors\":\"C. Yu-Chih, K. L. Young, J.Y. Chou\",\"doi\":\"10.1109/SMTW.2004.1393760\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The new technology, process control and cycle time management in semiconductor manufacturing for the R&D (research and development department) is import and is a great challenge task, because of the numerous engineering holds, lot splits, and necessary experimental processes are executing continued. The other challenge is an R&D pilot line exist large variety of process technologies. Therefore, short cycle time for new technology or process to meet customer demand is difficult but must to achieve the mission of the goal. Forecast this goal, we had kicked off a cooperation plan which name is `R&D cycle time system' with R&D members cooperate to complete it. In this paper, we present the system that includes six effective factors that they can easy to find symptoms on a long cycle time, a process or a technology issue by layer, stage or step. We give they name of these six key handling factors as x-ratio RD,x-ratio FAB,x-ratio RD, x-ratio FAB,f-factor and R1-factor . These measurements can judge whether delivered a lot on time on a layer, a stage or step and the process and technology is stable or unstable on it. Specially, the measurement value of f-factor and f1-factor can suggest a process step of technology is maturity or not. They like the eyes on this complex and changeful process flow of the R&D, this system hope to be a useful tool for supporting R&D member to find out the process, technology and cycle time issues about this kind of a tough question\",\"PeriodicalId\":369092,\"journal\":{\"name\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMTW.2004.1393760\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMTW.2004.1393760","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Key factor for new technology transfer on the R&D cycle-time system
The new technology, process control and cycle time management in semiconductor manufacturing for the R&D (research and development department) is import and is a great challenge task, because of the numerous engineering holds, lot splits, and necessary experimental processes are executing continued. The other challenge is an R&D pilot line exist large variety of process technologies. Therefore, short cycle time for new technology or process to meet customer demand is difficult but must to achieve the mission of the goal. Forecast this goal, we had kicked off a cooperation plan which name is `R&D cycle time system' with R&D members cooperate to complete it. In this paper, we present the system that includes six effective factors that they can easy to find symptoms on a long cycle time, a process or a technology issue by layer, stage or step. We give they name of these six key handling factors as x-ratio RD,x-ratio FAB,x-ratio RD, x-ratio FAB,f-factor and R1-factor . These measurements can judge whether delivered a lot on time on a layer, a stage or step and the process and technology is stable or unstable on it. Specially, the measurement value of f-factor and f1-factor can suggest a process step of technology is maturity or not. They like the eyes on this complex and changeful process flow of the R&D, this system hope to be a useful tool for supporting R&D member to find out the process, technology and cycle time issues about this kind of a tough question