模拟集成电路热热点识别的创新方法

Chun Haur Khoo, Z. J. Lau
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引用次数: 0

摘要

随着半导体晶圆制造工艺复杂性的增加,在产品开发初期或生产线末端对产品故障的响应和发现失效机制的时机成为至关重要的因素。有效利用光子发射显微镜(PEM)、激光信号注入显微镜(LSIM)和热热点定位(THS)等故障定位技术,可以显著缩短故障定位过程中的周期时间。本文将阐述利用调制三通技术与改进的外部电气连接相结合的热热点识别的创造性方法。
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Creative Approaches for Thermal Hot Spot Identification on Analog IC
With the increase in the complexity of semiconductor wafer fabrication processes, the timing in responding and discovering the failure mechanism to a product failure at the initial product development stage or at the end of production line becomes a crucial factor. Effectively utilization the fault localization technique such as Photon Emission Microscopy (PEM), Laser Signal Injection Microscopy (LSIM) and Thermal Hotspot Localization (THS) may be significantly shortened the cycle time in the fault localization process. This paper will illustrate the creative approaches for thermal hot spot identification using modulated THS technique coupled with modified external electrical connection.
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