基于cmos的谐振传感器

O. Brand
{"title":"基于cmos的谐振传感器","authors":"O. Brand","doi":"10.1109/ICSENS.2005.1597653","DOIUrl":null,"url":null,"abstract":"The paper provides an overview of resonant sensors based on CMOS technology. Applications of these sensors range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. The paper discusses CMOS-based fabrication approaches for resonant sensors, possible sensing and actuation schemes, suitable resonator materials, geometries and vibration modes. Two CMOS-based microsystems are highlighted: (i) a resonant chemical sensor and (ii) a resonant magnetic field sensor","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"CMOS-based resonant sensors\",\"authors\":\"O. Brand\",\"doi\":\"10.1109/ICSENS.2005.1597653\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper provides an overview of resonant sensors based on CMOS technology. Applications of these sensors range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. The paper discusses CMOS-based fabrication approaches for resonant sensors, possible sensing and actuation schemes, suitable resonator materials, geometries and vibration modes. Two CMOS-based microsystems are highlighted: (i) a resonant chemical sensor and (ii) a resonant magnetic field sensor\",\"PeriodicalId\":119985,\"journal\":{\"name\":\"IEEE Sensors, 2005.\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-10-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2005.1597653\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597653","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 12

摘要

本文综述了基于CMOS技术的谐振传感器。这些传感器的应用范围从惯性传感器到化学/生化传感器,从原子力显微镜到高频滤波器。CMOS技术可以使谐振微结构与必要的模拟和数字电路功能共集成。本文讨论了基于cmos的谐振传感器的制造方法,可能的传感和驱动方案,合适的谐振器材料,几何形状和振动模式。重点介绍了两种基于cmos的微系统:(i)谐振化学传感器和(ii)谐振磁场传感器
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
CMOS-based resonant sensors
The paper provides an overview of resonant sensors based on CMOS technology. Applications of these sensors range from inertial sensors to chemical/biochemical sensors, from atomic force microscopy to high-frequency filters. CMOS technology enables to co-integrate the resonant microstructures with necessary analog and digital circuit functions. The paper discusses CMOS-based fabrication approaches for resonant sensors, possible sensing and actuation schemes, suitable resonator materials, geometries and vibration modes. Two CMOS-based microsystems are highlighted: (i) a resonant chemical sensor and (ii) a resonant magnetic field sensor
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Batch fabrication of micro-coils for MR spectroscopy on silicon Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays Emissions sensors for high temperature fuel cell applications Device level vacuum packaged micromachined infrared detectors on flexible substrates A CMOS time-of-flight range image sensor with gates on field oxide structure
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1