{"title":"300mm FAB的及时AMHS交付","authors":"J. Chang, Yung Cheng","doi":"10.1109/SMTW.2004.1393706","DOIUrl":null,"url":null,"abstract":"When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.","PeriodicalId":369092,"journal":{"name":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Just-in-time AMHS delivery for 300 mm FAB\",\"authors\":\"J. Chang, Yung Cheng\",\"doi\":\"10.1109/SMTW.2004.1393706\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.\",\"PeriodicalId\":369092,\"journal\":{\"name\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMTW.2004.1393706\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMTW.2004.1393706","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
