{"title":"用于体内给药的真空隔离热微流量计","authors":"Yangming Li, K. Baek, M. Gulari, D. Lin, K. Wise","doi":"10.1109/ICSENS.2005.1597787","DOIUrl":null,"url":null,"abstract":"A thermal microflowmeter has been integrated into a bulk-micromachined recording probe to monitor drug delivery in the central nervous system at the cellular level. The flowmeter uses an arsenic-doped polysilicon heater/sensor supported on a dielectric membrane over the flow channel. It is capped by a vacuum-sealed microchamber to minimize heating of the surrounding tissue and maximize heating efficiency. Efficiencies of 18.8degC/mW in air and 17.4degC/mW in water are achieved. At an input power of 0.18mW, the flowmeter can detect a volumetric flow of 1.3nL/sec for a channel cross-section of 318mum2, corresponding to a flow velocity of 4.2mm/sec","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"A vacuum-isolated thermal microflowmeter for in-vivo drug delivery\",\"authors\":\"Yangming Li, K. Baek, M. Gulari, D. Lin, K. Wise\",\"doi\":\"10.1109/ICSENS.2005.1597787\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A thermal microflowmeter has been integrated into a bulk-micromachined recording probe to monitor drug delivery in the central nervous system at the cellular level. The flowmeter uses an arsenic-doped polysilicon heater/sensor supported on a dielectric membrane over the flow channel. It is capped by a vacuum-sealed microchamber to minimize heating of the surrounding tissue and maximize heating efficiency. Efficiencies of 18.8degC/mW in air and 17.4degC/mW in water are achieved. At an input power of 0.18mW, the flowmeter can detect a volumetric flow of 1.3nL/sec for a channel cross-section of 318mum2, corresponding to a flow velocity of 4.2mm/sec\",\"PeriodicalId\":119985,\"journal\":{\"name\":\"IEEE Sensors, 2005.\",\"volume\":\"2014 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-10-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2005.1597787\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2005.1597787","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A vacuum-isolated thermal microflowmeter for in-vivo drug delivery
A thermal microflowmeter has been integrated into a bulk-micromachined recording probe to monitor drug delivery in the central nervous system at the cellular level. The flowmeter uses an arsenic-doped polysilicon heater/sensor supported on a dielectric membrane over the flow channel. It is capped by a vacuum-sealed microchamber to minimize heating of the surrounding tissue and maximize heating efficiency. Efficiencies of 18.8degC/mW in air and 17.4degC/mW in water are achieved. At an input power of 0.18mW, the flowmeter can detect a volumetric flow of 1.3nL/sec for a channel cross-section of 318mum2, corresponding to a flow velocity of 4.2mm/sec
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