基于仿真的半导体制造中时间约束隧道运营管理方法*主题:IE:工业工程

B. Anthouard, Valeria Borodin, Quentin Christ, S. Dauzére-Pérés, Renaud Roussel
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引用次数: 0

摘要

半导体制造过程包括越来越多的(队列)时间限制,通常跨越多个操作,这影响了生产效率和质量。本文提出了一种基于离散事件模拟的方法,以支持操作员在高混合制造环境中在时间限制下管理批次。在阐述了时间约束管理的动机和问题之后,提出了该方法的主要特点和能力。然后根据基本事实验证该方法。在给出结论和观点之前,讨论了工业实例的计算实验。
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A Simulation-Based Approach for Operational Management of Time Constraint Tunnels in Semiconductor Manufacturing : *Topic: IE: Industrial Engineering
Semiconductor manufacturing processes include more and more (queue) time constraints, often spanning multiple operations, which impact both production efficiency and quality. This paper presents a discrete-event simulation-based approach to support operators who manage lots under time constraints in a high-mix manufacturing environment. After motivating and stating the problem of managing time constraints, the main characteristics and capabilities of the proposed approach are presented. The approach is then validated with respect to the ground truth. Computational experiments conducted on industrial instances are discussed before providing conclusions and perspectives.
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