一种用于逻辑存储电路的新型高压晶体管交流应力可靠性研究

J. Locati, V. D. Marca, C. Rivero, A. Régnier, S. Niel, K. Coulié
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引用次数: 0

摘要

本文研究了一种用于非易失性存储器(NVM)技术的双多栅极高压晶体管新结构的结可靠性。实验结果得到了TCAD仿真的支持。在新结构上进行了漏体交流应力测试,并与传统结构进行了比较,结果表明,在不同偏压条件下,利用其设计结构,在可靠性方面有了重要的提高。最后,给出了新体系结构的工艺优化和设计优化。
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AC stress reliability study of a new high voltage transistor for logic memory circuits
This paper presents a junction reliability study on a new architecture of high voltage transistor with a double poly gate for Non-Volatile Memory (NVM) Technology. The experiments results are supported by TCAD simulations. The drain-bulk AC stress was performed on the new architecture and compared with the conventional demonstrating an important improvement in terms of reliability, for different bias conditions, taking advantage of its design architecture. Finally, process and design optimizations of the new architecture are presented.
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