烧结银微粒与Ni-P成品DBC衬底直接结合

Chuantong Chen, Zheng Zhang, Takuya Misaki, S. Nagao, K. Suganuma
{"title":"烧结银微粒与Ni-P成品DBC衬底直接结合","authors":"Chuantong Chen, Zheng Zhang, Takuya Misaki, S. Nagao, K. Suganuma","doi":"10.23919/ICEP.2019.8733517","DOIUrl":null,"url":null,"abstract":"Sinter Ag joining as an attractive die attach material received more and more attention. Usually, to obtained an excellent strength bonding, sinter Ag joining need contact with the Ag, Au metallization layer on both chips and substrates. The electro- and electroless-plated Ni(P) technology was well developed and widely used. This work focuses on the bonding quality and high temperature reliability of sintering micron-sized Ag particles on an electro-less Ni-P plated substrate. High die shear strength of sinter Ag joining structure was obtained, which over 40 MPa with a sintering temperature 300Υ in air and pressure-less conditions. In addition, the high temperature aging test also was investigated at the aging temperature 250Υ for 500 h. The die shear strength keeps 30 MPa after 500h aging. The bonding mechanism of sinter Ag joining on the electro-less Ni-P plated structure was discussed by SEM, EDS analysis.","PeriodicalId":213025,"journal":{"name":"2019 International Conference on Electronics Packaging (ICEP)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Direct bonding with Ni-P finished DBC substrate with sinter Ag micro-sized particles\",\"authors\":\"Chuantong Chen, Zheng Zhang, Takuya Misaki, S. Nagao, K. Suganuma\",\"doi\":\"10.23919/ICEP.2019.8733517\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Sinter Ag joining as an attractive die attach material received more and more attention. Usually, to obtained an excellent strength bonding, sinter Ag joining need contact with the Ag, Au metallization layer on both chips and substrates. The electro- and electroless-plated Ni(P) technology was well developed and widely used. This work focuses on the bonding quality and high temperature reliability of sintering micron-sized Ag particles on an electro-less Ni-P plated substrate. High die shear strength of sinter Ag joining structure was obtained, which over 40 MPa with a sintering temperature 300Υ in air and pressure-less conditions. In addition, the high temperature aging test also was investigated at the aging temperature 250Υ for 500 h. The die shear strength keeps 30 MPa after 500h aging. The bonding mechanism of sinter Ag joining on the electro-less Ni-P plated structure was discussed by SEM, EDS analysis.\",\"PeriodicalId\":213025,\"journal\":{\"name\":\"2019 International Conference on Electronics Packaging (ICEP)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Electronics Packaging (ICEP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/ICEP.2019.8733517\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Electronics Packaging (ICEP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/ICEP.2019.8733517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

烧结银连接作为一种极具吸引力的模具附着材料越来越受到人们的关注。通常,为了获得优异的结合强度,烧结银连接需要与芯片和衬底上的Ag、Au金属化层接触。电镀和化学镀镍(P)技术得到了很好的发展和广泛的应用。本文研究了微米级银颗粒在化学镀镍-磷衬底上烧结的键合质量和高温可靠性。在空气和无压条件下,烧结银连接结构在烧结温度300Υ下获得了较高的模抗剪强度,达到40 MPa以上。此外,还进行了高温时效试验,时效温度为250Υ 500h,时效500h后模具抗剪强度保持30 MPa。采用扫描电镜、能谱分析等方法探讨了烧结银在化学镀Ni-P结构上的结合机理。
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Direct bonding with Ni-P finished DBC substrate with sinter Ag micro-sized particles
Sinter Ag joining as an attractive die attach material received more and more attention. Usually, to obtained an excellent strength bonding, sinter Ag joining need contact with the Ag, Au metallization layer on both chips and substrates. The electro- and electroless-plated Ni(P) technology was well developed and widely used. This work focuses on the bonding quality and high temperature reliability of sintering micron-sized Ag particles on an electro-less Ni-P plated substrate. High die shear strength of sinter Ag joining structure was obtained, which over 40 MPa with a sintering temperature 300Υ in air and pressure-less conditions. In addition, the high temperature aging test also was investigated at the aging temperature 250Υ for 500 h. The die shear strength keeps 30 MPa after 500h aging. The bonding mechanism of sinter Ag joining on the electro-less Ni-P plated structure was discussed by SEM, EDS analysis.
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