用于内联缺陷表征的自动化TEM工作流

ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis Pub Date : 2021-10-31 DOI:10.31399/asm.cp.istfa2021p0126

Hyun Woo Shim, Taehun Lee, J. Kwon

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摘要

该研究表明，通过使用商业上可用的工具添加缺陷标记步骤，可以实现内联缺陷表征的大容量TEM工作流程。将一个简单的用户辅助缺陷标记步骤添加到传统的自动化非原位起降TEM工作流程中，其吞吐量提高2.9倍，工时减少11倍，与传统的手动TEM工作流程相比，生产率显著提高。

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Automated TEM Workflow for Inline Defect Characterization

This study demonstrates that a high-volume TEM workflow can be achieved for inline defect characterization by adding a defect marking step using commercially available tools. A simple user-assisted defect marking step added to a conventional automated ex-situ lift-out TEM workflow showed 2.9 times faster throughput using 11 times less man-hours, a significant productivity gain over a conventional manual TEM workflow.

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ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis

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