{"title":"扫描透射电子显微镜差相衬成像技术的缺陷表征","authors":"Ching-Chun Lin, Kim Hsu","doi":"10.1109/IPFA47161.2019.8984823","DOIUrl":null,"url":null,"abstract":"A novel approach to detect the crystal defects extended along particular orientation using differential phase contrast (DPC) images with segmented type detector for wide range of devices and materials in scanning transmission electron microscope (STEM) is provided. In addition, the signals from different segments could be further processed to enhance the contrast of light elements specifically, which also called enhanced annular bright field (eABF) mode in segmented annular all field (SAAF) system.","PeriodicalId":169775,"journal":{"name":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"160 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope\",\"authors\":\"Ching-Chun Lin, Kim Hsu\",\"doi\":\"10.1109/IPFA47161.2019.8984823\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel approach to detect the crystal defects extended along particular orientation using differential phase contrast (DPC) images with segmented type detector for wide range of devices and materials in scanning transmission electron microscope (STEM) is provided. In addition, the signals from different segments could be further processed to enhance the contrast of light elements specifically, which also called enhanced annular bright field (eABF) mode in segmented annular all field (SAAF) system.\",\"PeriodicalId\":169775,\"journal\":{\"name\":\"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"volume\":\"160 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA47161.2019.8984823\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA47161.2019.8984823","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Defect Characterization by Differential Phase Contrast Imaging Technique in Scanning Transmission Electron Microscope
A novel approach to detect the crystal defects extended along particular orientation using differential phase contrast (DPC) images with segmented type detector for wide range of devices and materials in scanning transmission electron microscope (STEM) is provided. In addition, the signals from different segments could be further processed to enhance the contrast of light elements specifically, which also called enhanced annular bright field (eABF) mode in segmented annular all field (SAAF) system.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
