{"title":"基于结构不确定性方法的RTP系统鲁棒控制器设计","authors":"Sang Kyung Lee, Jong Hae Kim, Dochang Oh, H. Park","doi":"10.1109/SICE.1999.788672","DOIUrl":null,"url":null,"abstract":"In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a /spl mu/ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"139 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Robust controller design for RTP system using structured uncertainty approach\",\"authors\":\"Sang Kyung Lee, Jong Hae Kim, Dochang Oh, H. Park\",\"doi\":\"10.1109/SICE.1999.788672\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a /spl mu/ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method.\",\"PeriodicalId\":103164,\"journal\":{\"name\":\"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)\",\"volume\":\"139 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-07-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SICE.1999.788672\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SICE.1999.788672","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Robust controller design for RTP system using structured uncertainty approach
In this paper, we propose an robust controller design of rapid thermal processing (RTP) system using the structured uncertainty approach. Using the weighted mixed sensitivity function, we solve the robust stability problem against disturbance and temperature variation, and design a /spl mu/ controller using the curve fitting method against structured uncertainty. Finally, the simulation results are proposed to show the validity of the proposed method.
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