首页 > 最新文献

SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)最新文献

英文 中文
A compiler design for IEC 1131-3 standard languages of programmable logic controllers 可编程逻辑控制器的IEC 1131-3标准语言编译器设计
H. Kim, Jae Young Lee, W. Kwon
This paper proposes a compiler design for IEC 1131-3 standard languages of PLCs (programmable logic controllers). It describes the structure of the front end of the compiler and the optimization phase of the intermediate representation of the back end. The paper also proposes optimization methods using several characteristics of the PLC. A software-based optimization uses the flow of the program and a hardware-based optimization is implemented by a programmable logic device to accelerate the logical operations that are most part of the PLC instructions. A benchmark test shows the proposed compiler speeds up the execution of the PLC.
本文提出了一种针对plc(可编程逻辑控制器)的IEC 1131-3标准语言的编译器设计。描述了编译器前端的结构和后端中间表示的优化阶段。本文还根据PLC的几个特点提出了优化方法。基于软件的优化使用程序的流程,而基于硬件的优化通过可编程逻辑器件实现,以加速构成PLC指令大部分的逻辑操作。基准测试表明,所提出的编译器加快了PLC的执行速度。
{"title":"A compiler design for IEC 1131-3 standard languages of programmable logic controllers","authors":"H. Kim, Jae Young Lee, W. Kwon","doi":"10.1109/SICE.1999.788715","DOIUrl":"https://doi.org/10.1109/SICE.1999.788715","url":null,"abstract":"This paper proposes a compiler design for IEC 1131-3 standard languages of PLCs (programmable logic controllers). It describes the structure of the front end of the compiler and the optimization phase of the intermediate representation of the back end. The paper also proposes optimization methods using several characteristics of the PLC. A software-based optimization uses the flow of the program and a hardware-based optimization is implemented by a programmable logic device to accelerate the logical operations that are most part of the PLC instructions. A benchmark test shows the proposed compiler speeds up the execution of the PLC.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125575710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Mass measurement based on the law of conservation of momentum 基于动量守恒定律的质量测量
T. Mizuno, J. Minowa, K. Araki
A new type of mass measurement system is proposed for the realization of a simple mass measurement system under zero-gravity conditions. It estimates mass based on the law of conservation of momentum. Initially, two masses, one of which is a measurement object and the other is a reference mass, are made at rest. A repulsive force is generated between them so that they begin to move in opposite directions at certain velocities. The mass of the object is estimated from the ratio of their velocities. The principles of measurement and several experimental results are described.
为实现零重力条件下的简单质量测量系统,提出了一种新型的质量测量系统。它根据动量守恒定律来估计质量。最初,使两个质量处于静止状态,其中一个是测量物体,另一个是参考质量。它们之间产生了排斥力,因此它们开始以一定的速度向相反的方向运动。物体的质量是由它们的速度之比估计出来的。介绍了测量原理和几个实验结果。
{"title":"Mass measurement based on the law of conservation of momentum","authors":"T. Mizuno, J. Minowa, K. Araki","doi":"10.1109/SICE.1999.788591","DOIUrl":"https://doi.org/10.1109/SICE.1999.788591","url":null,"abstract":"A new type of mass measurement system is proposed for the realization of a simple mass measurement system under zero-gravity conditions. It estimates mass based on the law of conservation of momentum. Initially, two masses, one of which is a measurement object and the other is a reference mass, are made at rest. A repulsive force is generated between them so that they begin to move in opposite directions at certain velocities. The mass of the object is estimated from the ratio of their velocities. The principles of measurement and several experimental results are described.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128118453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Model reference feedback and PID control for interval plants 区间对象的模型参考反馈与PID控制
Y. Okuyama, F. Takemori
The physical parameters of controlled systems (plants) are uncertain and are accompanied with nonlinearity. The transfer function of the controlled system should, therefore, be expressed by interval polynomials. This paper describes the realization of robust control for that type of plant (interval system) via model reference feedback, and discusses the relationship between the feedback structure and the conventional PID control system. Robust performance of the feedback control system is evaluated by using a discrimination method of characteristic roots area on an s-plane. In this paper, we present designing examples of a robust control system via model reference feedback which corresponds to a high-gain feedback and a kind of PID control.
被控系统(对象)的物理参数是不确定的,并伴有非线性。因此,被控系统的传递函数应用区间多项式表示。本文介绍了利用模型参考反馈实现对该类对象(区间系统)的鲁棒控制,并讨论了反馈结构与传统PID控制系统的关系。利用s平面特征根面积判别方法对反馈控制系统的鲁棒性进行了评价。本文给出了一种基于模型参考反馈的鲁棒控制系统的设计实例,该系统对应于高增益反馈和一种PID控制。
{"title":"Model reference feedback and PID control for interval plants","authors":"Y. Okuyama, F. Takemori","doi":"10.1109/SICE.1999.788675","DOIUrl":"https://doi.org/10.1109/SICE.1999.788675","url":null,"abstract":"The physical parameters of controlled systems (plants) are uncertain and are accompanied with nonlinearity. The transfer function of the controlled system should, therefore, be expressed by interval polynomials. This paper describes the realization of robust control for that type of plant (interval system) via model reference feedback, and discusses the relationship between the feedback structure and the conventional PID control system. Robust performance of the feedback control system is evaluated by using a discrimination method of characteristic roots area on an s-plane. In this paper, we present designing examples of a robust control system via model reference feedback which corresponds to a high-gain feedback and a kind of PID control.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124610331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Smart control of headlight intensity of automobiles for improved night vision 智能控制汽车前照灯强度,提高夜视能力
P. Bajaj, S. Kher
In the early days of automobiles, speeds of vehicles were very low and there were relatively few vehicles on the road. The increase in the number of vehicles and their speed has already outpaced the improvements on roads and the other traffic facilities, resulting in unsafe road travel. The fundamental component of night driving is the headlight which provides better vision. On the other the hand vision of the driver is affected by the headlights of oncoming vehicles. Moreover, the traffic moves at a faster rate at night, this leads to head-on collisions. Night driving is a phenomenon governed by a number of factors. So to provide optimal illumination at all distances when vehicles are in the vicinity, a controller is designed such that speed, distance of a vehicle from another vehicle, driver action, weather condition, type of road (terrain, bend, highway) while driving are taken into account to generate the effective output intensity free of glare. Since the inputs are fuzzy in nature, a fuzzy controller is designed.
在汽车的早期,车辆的速度非常低,路上的车辆相对较少。车辆数量和速度的增加已经超过了道路和其他交通设施的改善,导致道路旅行不安全。夜间驾驶的基本组成部分是车头灯,它提供更好的视野。另一方面,驾驶员的手部视觉受到迎面而来车辆前灯的影响。此外,车辆在夜间的速度更快,这导致正面碰撞。夜间驾驶是一种由许多因素决定的现象。因此,为了在车辆附近的所有距离上提供最佳照明,设计了一个控制器,以便在驾驶时考虑速度,车辆与另一辆车辆的距离,驾驶员动作,天气状况,道路类型(地形,弯道,高速公路),以产生无眩光的有效输出强度。由于输入是模糊的,因此设计了模糊控制器。
{"title":"Smart control of headlight intensity of automobiles for improved night vision","authors":"P. Bajaj, S. Kher","doi":"10.1109/SICE.1999.788721","DOIUrl":"https://doi.org/10.1109/SICE.1999.788721","url":null,"abstract":"In the early days of automobiles, speeds of vehicles were very low and there were relatively few vehicles on the road. The increase in the number of vehicles and their speed has already outpaced the improvements on roads and the other traffic facilities, resulting in unsafe road travel. The fundamental component of night driving is the headlight which provides better vision. On the other the hand vision of the driver is affected by the headlights of oncoming vehicles. Moreover, the traffic moves at a faster rate at night, this leads to head-on collisions. Night driving is a phenomenon governed by a number of factors. So to provide optimal illumination at all distances when vehicles are in the vicinity, a controller is designed such that speed, distance of a vehicle from another vehicle, driver action, weather condition, type of road (terrain, bend, highway) while driving are taken into account to generate the effective output intensity free of glare. Since the inputs are fuzzy in nature, a fuzzy controller is designed.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115380402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A new Kalman formulation for the analysis of atmospheric lidar water vapor profiles 用于大气激光雷达水汽剖面分析的一种新的卡尔曼公式
A. K. Boakye, S. Yamagisi, H. Yamanouchi
A new Kalman formulation which we believe can be used in at least Rayleigh atmospheres was developed. Extension of the technique to real-time data analysis of atmospheric water vapor profiles and other species of meteorological importance is being considered.
我们提出了一个新的卡尔曼公式,我们相信它至少可以用于瑞利大气。目前正在考虑将该技术扩展到大气水汽剖面和其他重要气象物种的实时数据分析。
{"title":"A new Kalman formulation for the analysis of atmospheric lidar water vapor profiles","authors":"A. K. Boakye, S. Yamagisi, H. Yamanouchi","doi":"10.1109/SICE.1999.788588","DOIUrl":"https://doi.org/10.1109/SICE.1999.788588","url":null,"abstract":"A new Kalman formulation which we believe can be used in at least Rayleigh atmospheres was developed. Extension of the technique to real-time data analysis of atmospheric water vapor profiles and other species of meteorological importance is being considered.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121821696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Engineering investigation of intra cellular calcium ion transport across the sarcoplasmic reticulum membrane in the cellular plasma 胞内钙离子通过胞浆肌浆网膜运输的工程研究
H. Hirayama, T. Kimura
We applied the linear systems analysis and robustness analysis for intra cellular calcium ion transport across the sarcoplasmic reticulum. We computed the structural singular values and H2/H/spl infin/ norms. The present investigation can be used for evaluating the functional space of the calcium transport system.
我们应用线性系统分析和鲁棒性分析细胞内钙离子转运通过肌浆网。我们计算了结构奇异值和H2/H/spl中/范数。本研究可用于评价钙转运系统的功能空间。
{"title":"Engineering investigation of intra cellular calcium ion transport across the sarcoplasmic reticulum membrane in the cellular plasma","authors":"H. Hirayama, T. Kimura","doi":"10.1109/SICE.1999.788686","DOIUrl":"https://doi.org/10.1109/SICE.1999.788686","url":null,"abstract":"We applied the linear systems analysis and robustness analysis for intra cellular calcium ion transport across the sarcoplasmic reticulum. We computed the structural singular values and H2/H/spl infin/ norms. The present investigation can be used for evaluating the functional space of the calcium transport system.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116829909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of EALQR control design methodology EALQR控制设计方法分析
Y. Seo, J. Choi
EALQR (linear quadratic regulator with an eigenstructure assignment capability), a control design methodology previously developed by the authors, performs better than a conventional LQR or an eigenstructure assignment. However, it has a constraint on the weighting matrix, that is, the weighting matrix can be indefinite for some high-order systems. This paper analyzes the effects of an indefinite weighting matrix in EALQR on the frequency domain properties. The robustness criterion and the quantitative frequency domain properties are presented. The frequency domain properties of EALQR with an indefinite weighting matrix have been analyzed by applying them to a flight control system as a design example.
EALQR(具有特征结构分配能力的线性二次型调节器)是作者先前开发的一种控制设计方法,比传统的LQR或特征结构分配性能更好。但是,它对权重矩阵有一个约束,即对于某些高阶系统,权重矩阵可以是不定的。本文分析了EALQR中不确定加权矩阵对频域特性的影响。给出了鲁棒性准则和定量频域特性。以某飞控系统为例,分析了带不定权矩阵的EALQR的频域特性。
{"title":"Analysis of EALQR control design methodology","authors":"Y. Seo, J. Choi","doi":"10.1109/SICE.1999.788693","DOIUrl":"https://doi.org/10.1109/SICE.1999.788693","url":null,"abstract":"EALQR (linear quadratic regulator with an eigenstructure assignment capability), a control design methodology previously developed by the authors, performs better than a conventional LQR or an eigenstructure assignment. However, it has a constraint on the weighting matrix, that is, the weighting matrix can be indefinite for some high-order systems. This paper analyzes the effects of an indefinite weighting matrix in EALQR on the frequency domain properties. The robustness criterion and the quantitative frequency domain properties are presented. The frequency domain properties of EALQR with an indefinite weighting matrix have been analyzed by applying them to a flight control system as a design example.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117007869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
ANN-based handwritten character recognition 基于人工神经网络的手写字符识别
Hanmin Huang, Hu Xiyue, Zhang Ping, Chai Yi, Weiren Shi
Based on an artificial neural network, digital image processing, and features extraction theory, the authors analyzed a BP network's defect then presented improving solutions. In this paper, a new kind of handwritten character system has been constructed. Referring to the shortcoming of the traditional BP algorithm, a modified learning factor with adaptation is introduced, and a bizarre sample feature database is constructed for speeding up modified BP learning and classification. Experimental results show that the modified BP neural network algorithm (three layers forward, no feedback) can be used in handwritten character recognition, and satisfactory results have been obtained.
基于人工神经网络、数字图像处理和特征提取理论,分析了BP网络存在的缺陷,提出了改进方案。本文构建了一种新的手写体字符系统。针对传统BP算法的不足,引入了具有自适应的改进学习因子,构建了奇异样本特征库,加快了改进BP算法的学习和分类速度。实验结果表明,改进的BP神经网络算法(三层前向,无反馈)可用于手写体字符识别,并取得了满意的效果。
{"title":"ANN-based handwritten character recognition","authors":"Hanmin Huang, Hu Xiyue, Zhang Ping, Chai Yi, Weiren Shi","doi":"10.1109/SICE.1999.788719","DOIUrl":"https://doi.org/10.1109/SICE.1999.788719","url":null,"abstract":"Based on an artificial neural network, digital image processing, and features extraction theory, the authors analyzed a BP network's defect then presented improving solutions. In this paper, a new kind of handwritten character system has been constructed. Referring to the shortcoming of the traditional BP algorithm, a modified learning factor with adaptation is introduced, and a bizarre sample feature database is constructed for speeding up modified BP learning and classification. Experimental results show that the modified BP neural network algorithm (three layers forward, no feedback) can be used in handwritten character recognition, and satisfactory results have been obtained.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125470836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
EDM pulse control: a design approach 电火花加工脉冲控制:一种设计方法
S. Kher, A. Dua
The electro discharge machining operation has become relatively simple with the advent of CNC machines where the operator skills have been taken over by the skills built into the CNC. This is not so in the case of manual machines, where the operator skill is very critical to getting the final product finish; this being very true for a country like India, where most of the EDM users continue to use manual machines due to the prohibitive costs involved with CNC. An attempt has been made here to provide CNC like features in a manual ram type spark erosion machine at a fraction of the cost of a CNC, so that it is available to most of the users. One of the large hurdles in the EDM field is to ensure high material removal rates with better and predictable finishes and not getting the workpiece and tool damaged due to arcing or short-circuiting etc. This involves special waveforms to be produced for the eroding current, special h/w to take protective/corrective actions in case of a fault or an imminent fault and the presence of a good servo system. For this design, it is assumed that a good servo system is available and only the other two points are taken care of here. The scheme depicted involves the generation and alteration of the eroding current waveforms and the incorporation of special controls to take care of the fault conditions.
随着数控机床的出现,电火花加工操作变得相对简单,操作员的技能已经被内置在数控系统中的技能所取代。在手动机器的情况下就不是这样了,在手动机器中,操作员的技能对最终产品的完成非常关键;对于像印度这样的国家来说,这是非常正确的,由于CNC涉及的成本过高,大多数EDM用户继续使用手动机器。一个尝试已经在这里,以CNC的成本的一小部分,在手动冲压式火花侵蚀机提供CNC类似的功能,使它是提供给大多数用户。电火花加工领域最大的障碍之一是确保高材料去除率和更好的可预测的光洁度,并且不会因电弧或短路等而损坏工件和工具。这包括为腐蚀电流产生的特殊波形,在发生故障或即将发生故障时采取保护/纠正措施的特殊h/w,以及良好的伺服系统的存在。对于本设计,假设有一个良好的伺服系统,这里只考虑其他两点。所描述的方案涉及腐蚀电流波形的产生和改变,并结合特殊控制来照顾故障条件。
{"title":"EDM pulse control: a design approach","authors":"S. Kher, A. Dua","doi":"10.1109/SICE.1999.788696","DOIUrl":"https://doi.org/10.1109/SICE.1999.788696","url":null,"abstract":"The electro discharge machining operation has become relatively simple with the advent of CNC machines where the operator skills have been taken over by the skills built into the CNC. This is not so in the case of manual machines, where the operator skill is very critical to getting the final product finish; this being very true for a country like India, where most of the EDM users continue to use manual machines due to the prohibitive costs involved with CNC. An attempt has been made here to provide CNC like features in a manual ram type spark erosion machine at a fraction of the cost of a CNC, so that it is available to most of the users. One of the large hurdles in the EDM field is to ensure high material removal rates with better and predictable finishes and not getting the workpiece and tool damaged due to arcing or short-circuiting etc. This involves special waveforms to be produced for the eroding current, special h/w to take protective/corrective actions in case of a fault or an imminent fault and the presence of a good servo system. For this design, it is assumed that a good servo system is available and only the other two points are taken care of here. The scheme depicted involves the generation and alteration of the eroding current waveforms and the incorporation of special controls to take care of the fault conditions.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132958997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A study on process control to improve yield in semiconductor manufacturing 半导体制造中提高良率的过程控制研究
Mun-Kyu Choi, Hunmo Kim
We present the process analysis system that can analyze causes, like an expert, after processes. Also, the plasma etching process that affects yield is controlled using an artificial neural network to predict output before the process. In modeling, a method that uses history for input data is considered, it offers advantages in both learning and prediction capability. This research regards the critical dimension that is considerable in highly integrated circuits as the output variable of the model. Based on a model using this method, we propose an algorithm to analyze and control the effect of input variables for predicted defects. Both the weight of input variables and their historical trend are examined for this algorithm.
我们提出了过程分析系统,可以像专家一样分析过程后的原因。同时,利用人工神经网络对影响成品率的等离子体刻蚀过程进行控制,在刻蚀过程开始前预测输出。在建模中,考虑了一种使用历史数据作为输入数据的方法,它在学习和预测能力方面都具有优势。本研究将高度集成电路中相当重要的临界维数作为模型的输出变量。在此模型的基础上,提出了一种算法来分析和控制输入变量对预测缺陷的影响。该算法对输入变量的权重及其历史趋势进行了检验。
{"title":"A study on process control to improve yield in semiconductor manufacturing","authors":"Mun-Kyu Choi, Hunmo Kim","doi":"10.1109/SICE.1999.788727","DOIUrl":"https://doi.org/10.1109/SICE.1999.788727","url":null,"abstract":"We present the process analysis system that can analyze causes, like an expert, after processes. Also, the plasma etching process that affects yield is controlled using an artificial neural network to predict output before the process. In modeling, a method that uses history for input data is considered, it offers advantages in both learning and prediction capability. This research regards the critical dimension that is considerable in highly integrated circuits as the output variable of the model. Based on a model using this method, we propose an algorithm to analyze and control the effect of input variables for predicted defects. Both the weight of input variables and their historical trend are examined for this algorithm.","PeriodicalId":103164,"journal":{"name":"SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130985642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
SICE '99. Proceedings of the 38th SICE Annual Conference. International Session Papers (IEEE Cat. No.99TH8456)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1