基于微型气体传感器的洁净室/建筑环境自动通风控制器的制造与设计

Ii Jin Kim, S. Han, Hi Dock Lee, Jin Suk Wang
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引用次数: 1

摘要

随着人们对环境问题的日益关注和生活水平的提高,对高灵敏度、高选择性的气体传感器在空气质量监测中有着迫切的需求。环境监测是当前国内环境监测的一个重要方面。我们试图开发一种传感器,可以帮助监测有害气体的存在。开发了一种自动通风控制器,用于排出住宅房间/建筑物中的有毒气体(CO, NO2, CH4, HCHO, C3H8, CO2)。它是为了节约能源和清洁环境而开发的。为此,采用微机电系统技术制作了微电子半导体型气体传感器,并设计了控制电路。进一步系统研究了该控制器对各种有毒气体的传感特性。已经观察到,传感器在检测很少的气体甚至非常小的浓度水平是有效的。所研制的传感器价格低廉,体积小,具有足够的灵敏度和抗环境条件的应用能力。传感器的功能和使用非常简单可靠
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Fabrication and design of an auto ventilation controller using micro gas sensor for the clean room/building environment
With the growing attention to environmental problems and the increase of standard of living, there are imperative needs for gas sensors with high sensitivity and excellent selectivity in air quality monitoring. Domestic environmental monitoring is an important aspect nowadays. We have tried to develop a sensor that can help to monitor the presence of harmful gases. An auto ventilation controller has been developed to expel out the toxic gases (CO, NO2, CH4 , HCHO, C3H8, CO2) from the residential rooms/buildings. It is developed to save energy and to clean the environment. For this, microelectronic semiconductor type gas sensor was made by MEMS (microelectromechanical system) technology and a control electronic circuit was designed. The potential of the controller was further systematically studied for its sensing characteristics against various toxic gases. It has been observed that sensor is effective in detecting few gases even up to very small concentration levels. The developed sensor is inexpensive, has small size, sufficient sensitivity and immunity to environmental conditions for applications. The functioning and use of the sensor is very simple and reliable
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