CMOS霍尔效应圆规的低成本环氧树脂封装

J. van der Meer, F. Riedijk, E. van Kampen, K. Makinwa, J. Huijsing
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引用次数: 3

摘要

首次提出了一种采用低成本环氧树脂封装的CMOS霍尔传感器的罗盘。由于CMOS霍尔传感器的高机械应力灵敏度,这种低成本的塑料或环氧模具封装并不是像指南针应用这样的低偏移应用的可行选择。取而代之的是昂贵的陶瓷包装。最近开发的应力不敏感CMOS霍尔传感器在环氧树脂成型后仅显示1.65muT偏移位移,同时保持其低3muT (3a)偏移扩展。经过反复的热冲击,霍尔传感器的偏移量几乎完全恢复到原来的值。在指南针的应用中,必须测量地球磁场的两个水平面分量。因此,开发了一个具有两个正交对齐霍尔传感器的封装
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Low-cost epoxy packaging of CMOS Hall-effect compasses
For the first time, a compass using CMOS Hall-sensors in a low-cost epoxy package is presented. Due to the high mechanical stress sensitivity of CMOS Hall-sensors, such low-cost plastic or epoxy mold packages have not been a viable option for low-offset applications like the compass application. Instead, expensive ceramic packages have been used. A recently developed, stress insensitive, CMOS Hall-sensor, shows only a 1.65muT offset shift after epoxy molding, while maintaining its low 3muT (3a) offset spread. After repeated thermal shock, the Hall sensor's offset returns almost completely to its original value. For the compass application, the two horizontal plane components of the earth's magnetic field have to be measured. So a package with two orthogonally aligned Hall-sensors was developed
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