关于NBTI的“永久性”成分

Tibor Grasser, T. Aichinger, Hans Reisinger, Jacopo Franco, P. Wagner, Michael Nelhiebel, C. Ortolland, B. Kaczer
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引用次数: 9

摘要

最近的一些出版物解释NBTI是由于一个可恢复的和更永久的组成部分。虽然已经收集了关于可恢复组件的大量信息,但永久组件有些难以捉摸。我们证明了通常与可恢复组分相关的氧化缺陷也对NBTI的永久组分有重要贡献。因此,它们既可以产生阈值电压偏移,也可以产生电荷泵送电流。在有利条件下,永久组件的回收率可与可回收组件相当。
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On the ‘permanent’ component of NBTI
A number of recent publications explain NBTI to be due to a recoverable and a more permanent component. While a lot of information has been gathered on the recoverable component, the permanent component has been somewhat elusive. We demonstrate that oxide defects commonly linked to the recoverable component also form an important contribution to the permanent component of NBTI. As such, they can contribute to both the threshold voltage shift as well as the charge pumping current. Under favorable conditions, the permanent component can show recovery rates comparable to that of the recoverable component.
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